气体输送系统安全培训教材 .ppt

Purifiers--Applications Easy maintenance/change Safety Life tracking by cylinder changes Increase panel piping life (corrosion, contamination) Purge gas purifier improves cylinder purge Purifiers--Applications Other applications Epi/CVD Sputtering (metal applications) There maybe multiple purifiers located in the Argon delivery lines. The metal process must be particle free. If particles are present they could cause shorts or opens in the metal lines. Corrosive/reactive gas Gas Properties Challenging Flow Control Ammonia (NH3) Liquefied compressed gas Boron Trichloride (BCl3) Liquefied compressed gas Gas Properties Challenging Flow Control Chlorine (Cl2) Liquefied compressed gas Diborane (B2H6) Compressed gas Dichlorosilane (SiH2Cl2) Liquefied compressed gas Disilane (Si2H4) Compressed gas Gas Properties Challenging Flow Control Gas Properties Challenging Flow Control Hydrogen Bromide (HBr) Liquefied compressed gas Hydrogen Chloride (HCl) Liquefied compressed gas Hydrogen Fluoride (HF) Liquefied compressed gas Nitrous Oxide (N2O) Liquefied compressed gas Silane (SiH4) Compressed gas Tungsten Hexafluoride (WF6) Gas Properties Challenging Flow Control Testing Analysis 测试及分析 高纯气体管道需如下测试（尤其适用高危险性特气系统）： Press test压力测试　=1%drop @1.15 design bar * 24hr Helium leak test氦检漏测试 cc.atm/sec(一个大气压下每秒泄漏??CC)，测试仪器Alcatel or Infocom 针对６“Fab的特气系统通常2.0x10-9cc.atm/sec Particle Increase Counter颗粒度测试 ?pcs/scf ?μm (每立方英尺大于?的颗粒数不大于?个)，测试仪器 PMS-u-LPC-101-HP 针对6”Fab的特气系统通常=10pcs/scf, 0.1um Moisture Increase Analysis水分增量分析 ppb(十亿分之一)，测试仪器Meeco/Ametek 针对６“Fab的特气系统通常50ppb Oxygen Increase Analysis氧分增量分析 ppb(十亿分之一)，测试仪器Delta-F 针对６“Fab的特气系统通常50ppb Materials of Construction Typical Materials of pipe or tube construction for the gas industry Cylinder Gas Cabinet A Variety of Gas Delivery Systems Examples: APCI GG250, 450, 500 Norcimbus Semi gas ATTO CVD KC-Tech