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SEMI F19-0304
SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED
SURFACES OF STAINLESS STEEL COMPONENTS
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 4, 2003. Initially available at February 2004; to be published March
2004. Originally published in 1995.
NOTICE: This document was completely rewritten in SEMI F60 ó Test Method for ESCA Evaluation of
2004. Surface Composition of Wetted Surfaces of Passivated
316L Stainless Steel Components
1 Purpose
SEMI F70 ó Test Method for Determination of
1.1 The purpose of this specification is to provide a Particle Contribution of Gas Delivery System
standard for the quality of the wetted surfaces of
SEMI F72 ó Test Method for Auger Electron
stainless steel components used in the chemical (gas
Spectroscopy (AES) Evaluation of Oxide Layer of
and liquid) distribution systems of semiconductor
Wetted Surfaces of Passivated 316L Stainless Steel
manufacturing facilities.
Components
2 Scope SEMI F73 ó Test Method For Sca
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