单光场时栅传感器光源仿真与光场分布分析.docx

摘要 高精密位移传感器是衡量一个国家制造业发展水平的重要标志。常见的高精密位移传感器以光学位移传感器为主，其中应用范围最广泛的是激光干涉仪和光栅。前者因光路直接暴露于工作环境中，存在抗干扰性差、对工作环境要求高、制造成本高等不足之处；后者因测量精度依赖于栅距的制造精度和空间细分，故存在制造工艺复杂、光栅尺制造设备价格极其昂贵等制约因素；因此，作者所在课题组开展了光场式时栅传感器的研究。在前期单光场时栅传感器测量原理被验证的基础上，本文从光源光场分布特征出发深入开展了光场分布误差分析和优化方面的研究。主要研究工作如下： （1）通过LED结构、均匀性二次配光设计和准直性二次配光设计，详细分析了LED光场分布特性，并且对相应光场分布特性的LED产品进行测试与仿真分析，验证了之前光场分布特性的正确性。 （2）结合LED光场分布特性，对光强均匀性误差和散射角进行了深入分析，并提出一种中心对称分布的连续余弦透光栅面优化方法，设计了相应的电路及传感器样机。 （3）搭建了单光场时栅传感器实验平台，分别对光场分布误差和优化方法进行了实验验证；并对中心对称分布的连续余弦透光栅面传感器样机进行长周期测试。实验表明：在500mm测量范围内采用0.6mm栅距的测量样机，其测量误差可达到±1.3μm，误差带的宽度大约是0.4μm。 综上所述，本文详细分析了LED光场分布的特征及误差，提出了相应的优化结构；同时，进行了传感器小型化设计和验证性实验等工作。这些为光场式时栅传感器实现高精度测量和市场化提供了思考方向和理论基础。 关键词：光学传感器；光场分布；误差规律；配光光源；透光栅面  Abstract High precision displacement sensor is an important symbol of the development level of a countrys manufacturing industry. Optical displacement sensor is the main high precision displacement sensor, and the most widely used are the laser interferometer and the grating. The former light path is directly exposed to the working environment, which has the shortcomings of poor anti-interference, high requirements on the working environment and high manufacturing cost; The latter measurement precision depends on the manufacturing precision of the grid spacing and spatial subdivision, so there are some constraints such as difficult manufacturing technology and extremely expensive grating ruler manufacturing equipment; therefore, the research group of the author carried out the study on the light field time grating sensor. Based on the verification of measuring principle of the single light field time grating sensor, the analysis and optimization of light field distribution error are studied based on the distribution characteristics of light source in this paper. The main research work is as follows: The light field distribution characteristics of LED were analyzed in detail through the LED structure, the uniform secondary distribution design and the collimation secondary distribution desi