光栅传感器工作原理.ppt

光栅测量系统;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;长光栅 --- 直线位移 圆光栅 --- 角位移 ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;按运动形式分： 直线型---主光栅为直尺形→直线移动 旋转型---主光栅为圆盘形→旋转运动;;条纹宽度： ;方向性：垂直于角平分线，当夹角很小时 → 与光栅移动方向垂直 同步性：光栅移动一个栅距 → 莫尔条纹移动一个间距 →方向对应 放大性：夹角θ很小 → BW → 光学放大 → 提高灵敏度 可调性：夹角θ↓ → 条纹间距B↑ → 灵活 准确性：大量刻线 → 误差平均效应 → 克服个别/局部误差 → 提高精度 ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;光栅传感器特点 ;;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGINEERING AUTOMATION,FUZHOU UNIVERSITY ;THE COLLEGE OF MECHANICAL ENGI