aaf洁净室产品及ffu简介资料课件(共84页ppt).pptx

aaf洁净室产品及ffu简介资料课件(共84页ppt).pptx

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Better Air Is Our Business?;AAF Cleanroom Products AstroFan FFU AAF洁净室产品及FFU简介;;;High Efficiency Filters 高效过滤器 – HEPA ULPA 效率99.95% - 99.9995% @ 0.3μm;Cleanroom Products 洁净室产品 效率99.99% - 99.999995% @ MPPS;Cleanroom Products 洁净室产品 Ceiling System 吊顶系统;ASTROFAN FFU 风机过滤器机组;;Cold DOP - Heterogeneous polydispered aerosol having broad Particle size distribution : 3.0 micron 99+% 0.7 micron 50+% 0.4 micron 10+% Mean particle size about 0.72 micron Hot DOP - Thermally generated monodispered aerosol of 0.3um particles 加热产生的单分0.3微米的颗粒 PSL - Polystyrene latex spheres Monodispered Particles 单分颗粒 Uniform size 尺寸一致 Available in many size 多种尺寸供选择 DEHS - Di-2-ethylhexylsebacate - Liquid aerosol 液态气溶胶;Traditional DOP Test is not suitable for filter testing 传统的DOP测试已经不适合过滤器测试 DOP has finite vapor pressure. Out-gassing of DOP vapor from the filter caused organic contamination in the CR DOP挥发气可造成洁净室的有机污染 DOP is a suspect carcinogen DOP怀疑可致癌 In recent years PSL aerosols are becoming increasingly accepted as the preferred aerosol material PSL近年来被广泛使用: - PSL is inert PSL不挥发 - Uniform size of the PSL spheres 颗粒尺寸一致.;Filter Testing 过滤器检测;Auto Scan Machine 自动扫描仪 Diluter 稀释剂 Laser Particle Counters 激光粒子计数器 Automated Filter Leak Test Software 过滤器泄漏自动监测软件 Inclined Manometers 压力表;Filter Testing 过滤器检测;A rectangular probe is held 1” from the filter face, sweeping across the filter face in overlapping motion to locate leaks due to media breaks, pin-hole leaks, damage from manufacturing process or handling, integrity of bond between filter media and cellsides. 在过滤器表面1“处采用方形采样口,扫描过滤器,确定由于滤料破裂或小孔造成的泄漏,以及生产,搬运途中造成的滤料与框架之间的泄漏 Sampling rate 采样流量 - 1 cfm Traverse rate 扫描速度 - 10ft/min ( 3 min/min) Average air velocity - 90+ 10ft/min (0.45+ 0.05m/s) 平均面风速(laminar flow condition) Sequential counting system 连续计数系统;Standard

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