《微纳加工及应用》镀膜技术－物理气相沉积.pptx

微纳加工及应用;感应加热 电子束加热 激光加热 直流溅射 射频溅射 磁控溅射 离子束溅射 直流二极型离子镀 射频放电离子镀 等离子体离子镀;?新的薄膜制备技术：;两种常见的薄膜结构;周期多层膜（新器件，新体系的探索）;;Shadow evaporation tech;脉冲激光沉积(PLD);;PLD System;;Emergent phenomena at oxide interfaces;Emergent interface states;;;;RHEED pattern and surfaces;RHEED intensity oscillation and the growth rate;;Molecular Beam Epitaxy (MBE);;;;;;;;Molecular Beam Epitaxy: Process Ultra-pure elements are heated in separate quasi- knudson effusion cells (e.g., Ga and As) until they begin to slowly sublimate. Gaseous elements then condense on the wafer, where they may react with each other (e.g., GaAs). The term “beam” means the evaporated atoms do not interact with each other or with other vacuum chamber gases until they reach the wafer.;How to Achieve Ultra-High Mobility ?;;;;;MBE for nanowire;MBE for nanowire;MBE for nanowire;