CT扩散炉培训教材(设备中英文版).ppt

centrotherm扩散炉设备培训 equipment training of centrotherm Diffusion furnace ;Centrotherm扩散炉的组成;设备 平面结构Equipment plane structure ;Loading box上料箱 ;Loading box上料箱 ;Loading box 上料箱;TGA有毒气体排放;Heating furnace炉膛;Gas cabinet气源柜;Cooling water inlet and water system冷却水系统;Thermostatic bath恒温槽;Silicon carbide paddle碳化硅桨;Range detection alarm范围检测报警器; Communication Network Overview通信网络总览;Heating system加热系统;Cooling system冷却系统;Alarm lamp information;Operation panel操作面板;Operation panel操作面板;Operation panel操作面板;CMI interface CMI桌面信息;CMI interface CMI桌面信息;The CMI user interfaceCMI使用者桌面;简单介绍CESAR界面A brief introduction to CESAR interface;CT操作注意事项CT operation matters needing attention;CT操作注意事项CT operation matters needing attention;5.舟位于存储架（storage2,3）时，一定要确认存储架上 的感应器有没有感应到，否则有可能导致撞舟。 When the boat is located on the storage rack (storage2, 3),make sure that the storage rack sensor is sensed, otherwise may cause the bumped boat. 6.从手动切换自动时，Grip一定要在Middle位置， 否则机械臂可能因无法正常运行而报警。 From manual automatic, Grip must be in the Middle position, or mechanical arm may be due to normal operation and alarm.;7.进舟后，工艺无法运行，先确认舟在桨上的位置，以及 Tube=ready SLS=UP TGA=YES 然后进行操作。 In the boat, technology cannot run, make sure the boat on the oar position, as well as Tube = ready SLS = UP TGA = YES then operation. ;常见故障;Boat already in tube------- Select:{Process=0. Unload=1}(……….) 选择0或1　 说明：当管内有舟存在时，异常排除 后手动运行工艺时会出现此提示 Boat already in tube------- Select:{Process=0. Unload=1}(……….) 　 Description: When the?tube?has?a boat?there, the exception?rule out?runningprocess?manually after?this prompt?will appear. ;Lost homing check poti 失去引导，检 查位置（一般此警报会自动解除） 说明：此警报会自动解除，但需要 检查一下桨是否在原点位置即可 Lost homing check poti Check the?location?(usually?the?alarm?will be automatically lifted) Description: This?alarm?will be automatically lifted,?but need Check?whether the?o