汽车电子委员会AEC_Q103-002_Rev-Failure Mechanism Based Stress Test Qualification for Micro Electro-Mechanical System (MEMS) Pressure Sensor Devices.pdf

AEC - Q103 - 002 Rev- March 1, 2019 FAILURE MECHANISM BASED STRESS TEST QUALIFICATION FOR MICRO ELECTRO-MECHANICAL SYSTEM (MEMS) PRESSURE SENSOR DEVICES Automotive Electronics Council Component Technical Committee AEC - Q103 - 002 Rev- March 1, 2019 Automotive Electronics Council Component Technical Committee TABLE OF CONTENTS AEC-Q103-002 Failure Mechanism Based Stress Test Qualification for Micro Electro- Mechanical System (MEMS) Pressure Sensor Devices Appendix 1: Definition of a Qualification Family Appendix 2: Q103-002 Certification of Design, Construction and Qualification Appendix 3: Minimum Requirements for Qualification Plans and Results AEC - Q103 - 002 Rev- March 1, 2019 Automotive Electronics Council Component Technical Committee Acknowledgment Any document involving a complex technology brings together experience and skills from many sources. The Automotive Electronics Council would especially like to recognize the following significant contributors to the revision of this document: MEMS Pressure Sensor Sub-Committee Members: Ramon Aziz Delphi Technologies Michael Hillmann Hella Klaus Adlkofer Infineon Thomas B. VanDamme Magna Elect