pecvd函数语句解释.pdf

centrotherm CESAR Recipe Description PECVD SiNx Deposition Version 2.0 Reg97, CAN EFM CESAR Recipe Description PECVD SiNx This manual was created and checked with highest accuracy. However centrotherm takes no responsibility for damages, which could be traced to errors in this documentation. Descriptions and technical data especially are no guaranteed attributes in the legal sense. centrotherm can take modifications on the described product or the documentation at any time without preliminary announcement if these are necessary for reliability or quality assurance or promote technical improvement. Distribution or duplication of this document and commercialization or transmission of its content is strictly forbidden without our explicit written approval. Counteraction obligates indemnification. © centrotherm All rights reserved. Version 1.0: Januar 2002 Author: Dr. Jan Dirk Kähler Version 2.0: May 2009 Author: Tamir Berman …PV-Neu\Group_Process\04a - AP-Diffusion\How to start\POCL3Recipe.doc centrotherm centrotherm photovoltaics AG Johannes-Schmid-Strasse 8 D-89143 Blaubeuren Germany 03.11.2009 © centrotherm 1 CESAR Recipe Description PECVD SiNx Introduction This document describes an example of a PECVD SiNx recipe. This recipe was verified on the centrotherm PECVD Furnace. One may not see the following described recipe as a standard recipe. The recipe