Centrotherm工艺过程说明.doc

centrotherm TITLE CESAR Recipe Description SUBJECT PE-Nitride Version 1.0 Reg97, CAN EFM TITLE SUBJECT DATE 25.05.2010 ? centrotherm PAGE 11 This manual was created and checked with highest accuracy. However centrotherm takes no responsibility for damages, which could be traced to errors in this documentation. Descriptions and technical data especially are no guaranteed attributes in the legal sense. centrotherm can take modifications on the described product or the documentation at any time without preliminary announcement if these are necessary for reliability or quality assurance or promote technical improvement. Distribution or duplication of this document and commercialization or transmission of its content is strictly forbidden without our explicit written approval. Counteraction obligates indemnification. ? centrotherm All rights reserved. Author: AUTHOR Dr. Jan Dirk K?hler CREATEDATE \@ MMMM yyyyOctober 2002 File: \...\texte\FILENAME Rez_PENIT_e.doc centrothermElektrische Anlagen GmbH+Co. Johannes-Schmid-Stra?e 3D - 89143 Blaubeuren Germany Tel.: (+49) 07344-951-0Fax: (+49) 07344-951-333e-mail: diff@centrotherm.de Legend of changes Index Date Name Description of changes Index of sample recipes TOC \o 1-3 1. Si-Nitride deposition for n=2.05 ?0.05 (SIN205.PRZ) 4 2. Boat etching (ETCH.PRZ) 12 3. Boat coating (NITCOAT.PRZ) 18 4. Standby recipe (IDLE.PRZ) 19 Si-Nitride deposition for n=2.05 ?0.05 (SIN205.PRZ) ; c e n t r o t h e r m ; CESAR ; Name: export\PECVD1-1\recipe\SIN205.PRZ ; Date: 10/25/2002 12:06:40 Author = cth Comment = SiN-process 450°C n=2.05 CoolingTime = 5 LoadOrder = Default Version = 001 Begin Library SOFTLAND Library T5Z97 Library STANDARD Library NITPESTD Library VACUUM10 Library FLAWAMAT At the beginning all libraries used in the recipe have to be declared. The library is a set of procedures. The procedure “START” for example is contained in the tube specific library NITPESTD (LibTub