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SEMATECH Equipment Installation Sign-off Procedure
International SEMATECH
Technology Transfer #-XFR
SEMATECH and the SEMATECH logo are registered service marks of SEMATECH, Inc.
International SEMATECH and the International SEMATECH logo are registered service marks
of International SEMATECH, Inc., a wholly-owned subsidiary of SEMATECH, Inc.
Product names and company names used in this publication are for identification purposes only
and may be trademarks or service marks of their respective companies
© 1998 International SEMATECH, Inc.
SEMATECH Equipment Installation Sign-off Procedure
Technology Transfer #-XFR
International SEMATECH
October 15, 1998
Abstract: The Equipment Installation Sign-off Procedure uses various checklist tools that guide
SEMATECH personnel through reviews of semiconductor manufacturing equipment installation
projects at pre-defined stages of the design and installation. Such reviews provide an opportunity
for SEMATECH personnel to verify that required environment, safety, and health (ESH) and
regulatory compliance elements are in place before starting up equipment. The Equipment
Installation Checklist that corresponds to this procedure aids in proactively identifying
deficiencies in the design and installation while establishing accountability for the complet
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