AEC Q103-002 Rev-A2023 FAILURE MECHANISM BASED STRESS TEST QUALIFICATION FOR MICRO ELECTRO-MECHANICAL SYSTEM (MEMS) PRESSURE SENSOR DEVICES 基于失效机理的微机电系统压力传感器装置 _ _ 应力测试合格性研究.pdf

AEC-Q103-002Rev-A

Seotember17.2023

FAILUREMECHANISMBASED

STRESSTESTQUALIFICATION

FOR

MICROELECTRO-MECHANICAL

SYSTEM(MEMS)PRESSURE

SENSORDEVICES

Autom。tiveElectronicsc。uncil

c。mp。nentTechnicalc。mmittee

AEC•Q103•002Rev-A

Seotember17.2023

Aut。m。tiveElec~r。nic~c。u『lCil

ComponentTechnicalCommittee

TABLEOFCONTENTS

AEC-0103-002FailureMechanismBasedStressTestQualificationforMicroElectro-

MechanicalSystem(MEMS)PressureSenso『Devices

Appendix1:DefinitionofaQualificationFamily

Appendix2:0103-002CertificationofDesign豆ill!Construction

Appendix3:MinimumRequirementsforQualificationPlansandResults

AEC•Q103•002Rev-A

Seotember17.2023

Aut。m。tiveElec~r。nic~c。u『lCil

ComponentTechnicalCommittee

Acknowledgment

Anydocumentinvolvingacomplextechnologybringstogetherexperienceandskillsfrommanysources.The

AutomotiveElectronicsCouncilwouldespeciallyliketorecognizethefollowingsignificantcontributorstothe

revisionofthisdocument:

MEMSPressureSensorSub-CommitteeMembers:

RamonAziz

坠旦旦笠盟I

MichaelHillmannHella

KlausAdlkoferInfineonTechnologies

ChristineLieseaanaInfineonTech『ioloaies