电子器件 技术文件Plasma_Module_General_Introduction.pdfVIP

PlasmaModelingofCOMSOL

Multiphysics®

WhyCOMSOLMultiphysics?

•Multiphysics

–Couplingphenomena

•SinglePhysics

–Oneintegratedenvironment–different

physicsandapplications

•Adaptable,noneedforuser-subroutines

–Createyourownmultiphysicscouplings

–Typeinnonlinearexpressions,look-uptables,

orfunctioncalls

–Optionaluser-interfacesforworkingdirectly

withequations:algebraic,PDEs,andODEs

–Parameterizeonanything

•High-PerformanceComputing(HPC):

–MulticoreMultiprocessor

–Clusters

COMSOLMultiphysics4.4ProductLine

COMSOLMultiphysicsPlasmaModule

WhatisaPlasma?

•Definition

•Plasmasareconductiveassembliesofchargedparticles,neutralsandfieldsthatexhibitcollectiveeffects.

•Industries

•Lighting

•Semiconductor

•Military

•Coating

•…

TypesofPlasma

•Thefollowingarethemostcommontypesofplasmas:

•Inductivelycoupledplasmas(Easy)

•DCdischarges(Easy,MagneticFieldenhancedHard)

•Microwaveplasmas(Medium,ECRHard)Increasing

•Electricalbreakdown(Hard)difficultyto

•Capacitivelycoupledplasmas(Hard)model

•CombinedICP/CCPreactor()

•Ineachoftheabove,themechanismofenergytransferfromtheelectromagneticfields

totheelectronsisdifferent.

ThePlasmaModuleisdesignedfornon-nuclear,low

temperatureplasmas(non-equilibriumdischarges)

Componentsofaplasma

•Aplasmaconsistsof:

–Electromagneticfiel