SEMEDX User Instructions扫描电镜用户指南.pdf

SEMVEDXUserInstructions

HongtaoShi

April3,2005

WilliamATKeckNIicroanalysisLabDoratory

SoliolllaStateUniversity

L_Beforethelabstarts.….

Signinonthelogbook.

MakecsurcthecoolingwaterinthcchillerisFULLandthatthebluclight

onSEMisON.indicatingagoodvacuum.Theunitisnormallylcfton24xX7

exceptthesethreemonitors;fronlefttorighl,InfraredChamberscopeycamera，

SEM,andEDX(energydispersivex-raySpectroscopy).

Takeofanywatchesorbraceletstoavoidpossibledamageofthevacuuinsealing

whenloadqingorunloadingthesample.

Turnonallthosethreemomnitorsfromlefttoright、Toobtainacharmberpicture，

PressthePowerbuttonontheremiotecortTol、

MakesurcthchighvoltagcisOFPFandthcesamplcstagejsscttoHOME.

一开thehighvoltageinON,，movetheFilamentCurrentslidertozeroOver

15secondsandthenclickOFTFtoturnoO人thehighvoltage-

一GototheStagcControlBoxandclickHOMEtomakcsurcthcsample

stagejs]oWeloughsoyouwonthittheelectrongunWhenyouexchange

thesample，TheinfraredcameradisplaysthePositionofthesarmplestage

arldtheelectrongun，Remermnbertheimageisle人Tightimnverted.

开youhavceanyqucstions,chinilneorcallmeat664-2013.

2Loadthesample

Putonrubberglovesandmountthesampleonanaltliminumstubusingcarbon

conductivetabs(CCT)，whichselfadheretothestub.

开thesample8inthefornmofPowders，makesureyoutapthestubafter

ImountingthepowdersontheCCTtoremoveanyexcesspowder,Ifthesample

isasolid,pickafatsurfaccandccntcrthatonthcCCT.

开thereareImnulliplesamples，Uusetweexzerstoputthemona