《电子信息专业英语》课件 Lesson 5 Manufacturing Process of Semiconductor.pptxVIP

Lesson5ManufacturingProcessofSemiconductor

;■Wafer[’we?f?]芯片■Oxidation[’?ks?’de???n]氧化

■etch[et?]刻蚀■Dryetching干法刻蚀

■IonImplant[’a??n][?m’pl?nt]离子注入

■Diffusion[d?’fju:??n]扩散■Semiconductor[’semik?n’d?kt?]半导体

■photolithography[’f?ut?li’θ?ɡr?fi]光刻

■Wetetching湿法刻蚀

■Doping掺杂

■ICProductionLine集成电路生产线;■工作任务：集成电路是怎样制造出来的？

■学习目标：掌握半导体制造工艺的基础知识，理解常见的工艺步骤，了解常见的半导体工艺流程

■重点难点：半导体制造工艺的基础知识、半导体工艺的流程

■推荐学时：6学时;工作任务：

HowtheIntegratedCircuitsaremanufactured?

Introduction

■WhyisdesigningdigitalICsdifferenttodaythanitwasbefore?

■Willitchangeinfuture?

;TheElectronicEra

TherootsoftheelectronicindustryarebasedonthevacuumtubeandearlyuseofsiliconforsignaltransmissionpriortoWorldWarII.Thefirstelectroniccomputer,theENIAC,wasdevelopedattheUniversityofPennsylvaniaduringWorldWarII.

WilliamShockley,JohnBardeenandWalterBrattaininventedthesolid-statetransistoratBellTelephoneLaboratoriesonDecember16,1947.Thesemiconductorindustrygrewrapidlyinthe1950stocommercializethenewtransistortechnology,withmanyearlypioneersworkinginSiliconValleyinNorthernCalifornia.

The1950ssawthedevelopmentofmanydifferenttypesoftransistortechnology,andleadtothedevelopmentofthesiliconage.

The1960swereaneraofprocessdevelopmenttobegintheintegrationofICs,withmanynewchip-manufacturingcompanies.

The1970sweretheeraofmedium-scaleintegrationandsawincreasedcompetitionintheindustry,thedevelopmentofthemicroprocessorandthedevelopmentofequipmenttechnology.

The1980sintroducedautomationintothewaferfabandimprovementsinmanufactu